JPS6211171U - - Google Patents
Info
- Publication number
- JPS6211171U JPS6211171U JP10006485U JP10006485U JPS6211171U JP S6211171 U JPS6211171 U JP S6211171U JP 10006485 U JP10006485 U JP 10006485U JP 10006485 U JP10006485 U JP 10006485U JP S6211171 U JPS6211171 U JP S6211171U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- coated
- induction heating
- heated
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10006485U JPS6211171U (en]) | 1985-07-02 | 1985-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10006485U JPS6211171U (en]) | 1985-07-02 | 1985-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6211171U true JPS6211171U (en]) | 1987-01-23 |
Family
ID=30969528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10006485U Pending JPS6211171U (en]) | 1985-07-02 | 1985-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211171U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6220868A (ja) * | 1985-07-22 | 1987-01-29 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜作製装置 |
-
1985
- 1985-07-02 JP JP10006485U patent/JPS6211171U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6220868A (ja) * | 1985-07-22 | 1987-01-29 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜作製装置 |